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1

Fabrication of microsuspensions on silicon substrate

Ghodsian, Bahram

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2002

Language:

english

File:

PDF, 779 KB

english, 2002

2

SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Micromachining and Microfabrication Process Technology V - Standard postprocessing technique for fabrication of large microsuspended structures in CMOS

Ghodsian, Bahram, Milanovic, Veljko, Villavicencio, Orlando, Smith, James H., Karam, Jean Michel

Year:

1999

Language:

english

File:

PDF, 1.53 MB

english, 1999

3

SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 14 March 2004)] Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology - RF MEMS capacitive switch with isolation valley at lower frequency band

won Jung, Chang, Varadan, Vijay K., Ghodsian, Bahram, Cetiner, Bedri A., De Flaviis, Franco

Year:

2004

Language:

english

File:

PDF, 303 KB

english, 2004

4

SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Micromachined Devices and Components IV - Micromachined gas detector based on self-aligned ionization tips

Ghodsian, Bahram, Syrzycki, Marek, Parameswaran, M., French, Patrick J., Chau, Kevin H.

Year:

1998

Language:

english

File:

PDF, 1.86 MB

english, 1998

5

SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Micromachining and Microfabrication Process Technology II - Simple technology for fabricating micromechanical 3D structures using electroplating without photoresist mold

Ghodsian, Bahram, Parameswaran, M., Syrzycki, Marek, Pang, Stella W., Chang, Shih-Chia

Year:

1996

Language:

english

File:

PDF, 833 KB

english, 1996

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